Посилання:Controlling the photoluminescence spectra
of porous nc-Si–SiOx structures by vapor treatment / V.A. Dan’ko, V.Ya. Bratus’, I.Z. Indutnyi, I.P. Lisovskyy, S.O. Zlobin, K.V. Michailovska, P.E. Shepeliavyi // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2010. — Т. 13, № 4. — С. 413-417. — Бібліогр.: 22 назв. — англ.
Підтримка:This work was partially supported by the project
1.1.7/18 of the State Special Scientific-Technical
Program on the development and creation of sensor
science intensive products for 2008-2012.
The effect of HF and H₂O₂ vapor treatment on the spectral composition and
intensity of photoluminescence (PL) in porous oblique deposited nc-Si–SiOx structures
have been studied using FTIR, electron-spin resonance (EPR) and PL measurements. As
a result of HF vapor treatment, considerable PL intensity growth and blueshift of PL
peak position are observed. It is suggested that the evolution of the PL spectra in HF
vapor-treated samples can be attributed to selective-etching-induced decrease in Si
nanoparticle dimensions and to passivation of Si dangling bonds (that are nonradiative
recombination trap states) by hydrogen and oxygen. Additional treatment in H₂O₂ vapor
results in additional nc-Si surface oxidation and reduction of nc-Si size. The possibility to
control the PL characteristics (peak position and intensity) of the porous nc-Si–SiOx
structures in a wide range by above treatments is shown.