Agueev, O.A.; Svetlichny, A.M.; Soloviev, S.I.
(Semiconductor Physics Quantum Electronics & Optoelectronics, 2000)
For 3C-, 6H- and 4H-SiC polytypes of different conduction types and with various impurity concentrations we investigated absorption of incoherent radiation from the near IR spectral region at rapid thermal annealing. General ...