Baschenko, S.M.; Marchenko, L.S.
(Semiconductor Physics Quantum Electronics & Optoelectronics, 2010)
Compact-sized monopulse excimer laser with the foot-print equal to only
250×80 mm, total height 250 mm and beam axis height 50 mm was designed. Output
energy at the wavelength 308 nm (XeCl* mixture) is 5 mJ, maximal ...