Наукова електронна бібліотека
періодичних видань НАН України
періодичних видань НАН України
ZnO:Al wide zone “windows” deposited by magnetron sputtering on unheated substrate
Репозиторій DSpace/Manakin
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ZnO:Al wide zone “windows” deposited by magnetron sputtering on unheated substrate
Тема:
Пленочные материалы и покрытия
УДК:
537. 221:537.221
Посилання:
ZnO:Al wide zone “windows” deposited by magnetron sputtering on unheated substrate / B.Т. Boyko, G.S. Khrypunov, G.V. Yurchenko // Вопросы атомной науки и техники. — 2000. — № 5. — С. 91-93. — Бібліогр.: 10 назв. — англ.
Підтримка:
This work has been supported by the INTAS-96-0206 Project of European Commission and 7IP 050129 Project of Swiss National Science Foundation.
Дата:
2000
Переглядів:
926
Завантажень:
744
Анотація:
Electrical and optical properties of ZnO:Al films deposited on unheated glass substrate by non-reactive RF magnetron sputtering of target ZnO:Al₂O₃ (98/2 wt.%) were studied. It was shown that Zno:Al films with the thickness of 0.75 µm deposited at the magnetron power 130 W and 4 µbar argon pressure with adding of 4·10⁻³ µbar oxygen pressure during the first minute of condensation has the following electrical and optical characteristics: surface, resistance 6 Ω/ and transmittance in visible spectral range about 88%. The ZnO:Al films with such optical and electrical parameters are suitable for substrate configuration highly efficiency thin film solar cells on CuInSe₂ base.
