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періодичних видань НАН України
періодичних видань НАН України
Application of carbon as a barrier layer in Sc/Si multilayer X-ray mirrors
Репозиторій DSpace/Manakin
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Application of carbon as a barrier layer in Sc/Si multilayer X-ray mirrors
Тема:
Characterization and properties
Інший ID:
DOI:https://doi.org/10.15407/fm25.03.505
Посилання:
Application of carbon as a barrier layer in Sc/Si multilayer X-ray mirrors / Yu.P. Pershyn, I.Yu. Devizenko, V.S. Chumak, A.Yu. Devizenko, V.V. Kondratenko // Functional Materials. — 2018. — Т. 25, № 3. — С. 505-515. — Бібліогр.: 18 назв. — англ.
Дата:
2018
Переглядів:
802
Завантажень:
523
Анотація:
X-ray reflectometry in the hard X-ray region (λ = 0.154 nm) was used to investigate the barrier properties of carbon layers 0.2-1.3 nm thick in Sc/Si multilayer X-ray mirrors (MXMs) deposited by DC magnetron sputtering. Precise measurement of the MXM period makes it possible to record volumetric changes in the Sc/C/Si MXM with an accuracy better than 0.01 nm, thus the interaction of the carbon layers with the material of the matrix layers was revealed. The formation of carbide (Si-on-Sc interface) and carbide-silicide (Sc-on-Si nterface) layers was found. The reflectivity of the Sc/C/Si mirrors at the wavelength of ~ 46.9 nm was estimated.
