Application of carbon as a barrier layer in Sc/Si multilayer X-ray mirrors

Домашня сторінка
→
Фізико-технічні та математичні науки
→
Відділення фізико-технічних проблем матеріалознавства
→
Functional Materials
→
Functional Materials, 2018, том 25
→
Functional Materials, 2018, № 3
→
Переглянути статтю

dc.contributor.author	Pershyn, Yu.P.
dc.contributor.author	Devizenko, I.Yu.
dc.contributor.author	Chumak, V.S.
dc.contributor.author	Devizenko, A.Yu.
dc.contributor.author	Kondratenko, V.V.
dc.date.accessioned	2019-06-19T16:32:48Z
dc.date.available	2019-06-19T16:32:48Z
dc.date.issued	2018
dc.identifier.citation	Application of carbon as a barrier layer in Sc/Si multilayer X-ray mirrors / Yu.P. Pershyn, I.Yu. Devizenko, V.S. Chumak, A.Yu. Devizenko, V.V. Kondratenko // Functional Materials. — 2018. — Т. 25, № 3. — С. 505-515. — Бібліогр.: 18 назв. — англ.	uk_UA
dc.identifier.issn	1027-5495
dc.identifier.other	DOI:https://doi.org/10.15407/fm25.03.505
dc.identifier.uri	http://dspace.nbuv.gov.ua/handle/123456789/157155
dc.description.abstract	X-ray reflectometry in the hard X-ray region (λ = 0.154 nm) was used to investigate the barrier properties of carbon layers 0.2-1.3 nm thick in Sc/Si multilayer X-ray mirrors (MXMs) deposited by DC magnetron sputtering. Precise measurement of the MXM period makes it possible to record volumetric changes in the Sc/C/Si MXM with an accuracy better than 0.01 nm, thus the interaction of the carbon layers with the material of the matrix layers was revealed. The formation of carbide (Si-on-Sc interface) and carbide-silicide (Sc-on-Si nterface) layers was found. The reflectivity of the Sc/C/Si mirrors at the wavelength of ~ 46.9 nm was estimated.	uk_UA
dc.language.iso	en	uk_UA
dc.publisher	НТК «Інститут монокристалів» НАН України	uk_UA
dc.relation.ispartof	Functional Materials
dc.subject	Characterization and properties	uk_UA
dc.title	Application of carbon as a barrier layer in Sc/Si multilayer X-ray mirrors	uk_UA
dc.type	Article	uk_UA
dc.status	published earlier	uk_UA