Polishing of AlN/sapphire substrates obtained by thermochemical nitridation of sapphire

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Фізико-технічні та математичні науки
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Відділення фізико-технічних проблем матеріалознавства
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Functional Materials
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Functional Materials, 2013, том 20
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Functional Materials, 2013, № 2
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Polishing of AlN/sapphire substrates obtained by thermochemical nitridation of sapphire

Vovk, E.A. ; Budnikov, A.T. ; Nizhankovskyi, S.V. ; Kryvonogov, S.I. ; Krukhmalev, A.A. ; Dobrotvorskaya, M.V.

Тема: Technology

Інший ID: DOI: dx.doi.org/10.15407/fm20.02.253

URI: http://dspace.nbuv.gov.ua/handle/123456789/120073

Посилання: Polishing of AlN/sapphire substrates obtained by thermochemical nitridation of sapphire / E.A. Vovk, A.T. Budnikov, S.V. Nizhankovskyi, S.I. Kryvonogov, A.A. Krukhmalev, M.V. Dobrotvorskaya // Functional Materials. — 2013. — Т. 20, № 2. — С. 253-258. — Бібліогр.: 10 назв. — англ.

Дата: 2013

Завантажень: 733

Polishing of AlN/sapphire substrates obtained by thermochemical nitridation of sapphire

Анотація:

Physicochemical conditions and polishing suspension composition were established for polishing of AlN/sapphire templates obtained by thermochemical nitridation of sapphire. The use of the polishing suspension based on aerosil and KOH with pH 10.3 allowed to prepare the surface with a roughness Ra up to 1 nm. The morphology and element composition of AlN/sapphire surface at layer-by-layer removal of the nitridated layer were studied by the methods of atomic force microscopy and X-ray photoelectronic spectroscopy.

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