Анотація:
Electrochemical technologies have a high potential for display applications
because of their cheapness and simplicity, easiness to scaling to large substrates and lowtemperature
nature. However, in major display technologies the oxide films should be
deposited on transparent conductive substrate, usually ITO on glass. For dielectric
substrates like glasses, a special technology of current control is applied to anodizing
metal films, which changes the oxide porous structure in a final stage and prevents
formation of metal islands. To transform the residual metal nanowires into oxide, a
special fading process similar to anoding bonding can be done. Usually, high reactivity
electrolytes are used in the anodizing process, which destroys ITO layers. We have
analyzed chemical properties of ITO in various anodizing electrolytes and found some
suitable reagents and compositions. A lot of functional layers can be created by
anodizing. For example, different filters may be formed by filling the pores by ink jet
printing. Porous oxides can have low refractive indexes – lower than any bulk material,
and can be used as effective antireflective coatings. A titanium oxide cover film forms
“self-cleaning” surface due to its semiconductor photonics properties and oxygen
production.