Tomashik, Z.F.; Danylenko, S.G.; Tomashik, V.N.
(Semiconductor Physics Quantum Electronics & Optoelectronics, 1999)
Dissolution of InAs in HNO₃-HBr-H₂O solutions is studied. The surface of equal etching rates is constructed, and the limiting stages of the dissolution process are determined. Depending on the [HNO₃]/[HBr] ratio, InAs ...