Sachenko, A.V.; Belyaev, A.E.; Boltovets, N.S.; Vinogradov, A.O.; Pilipenko, V.A.; Petlitskaya, T.V.; Anischik, V.M.; Konakova, R.V.; Korostinskaya, T.V.; Kostylyov, V.P.; Kudryk, Ya.Ya.; Lyapin, V.G.; Romanets, P.N.; Sheremet, V.N.
(Semiconductor Physics Quantum Electronics & Optoelectronics, 2014)
We present both theoretical and experimental temperature dependences of
contact resistivity ρс(Т) for ohmic contacts to the silicon n⁺
-n-structures whose n⁺
-layer
was formed using phosphorus diffusion or ion implantation. ...