Petrov, Yu.V.; Garkusha, I.E.; Hassanein, A.; Solyakov, D.G.; Marchenko, A.K.; Chebotarev, V.V.; Ladygina, M.S.; Staltsov, V.V; Yelisyeyev, D.V.
(Вопросы атомной науки и техники, 2011)
Magnetoplasma compressor (MPC) of compact geometry has been designed and tested as a source of EUV
radiation. In present paper diagnostic system for registration of EUV radiation is described. It was applied for ...