Novikov, V.Yu.; Beresnev, V.М.; Kolesnikov, D.A.; Ivanov, О.N.; Lytovchenko, S.V.; Stolbovoy, V.A.; Kolodiy, I.V.; Kozachenko, A.O.; Kovaleva, M.G.; Kritsyna, E.V.; Glukhov, О.V.
(Вопросы атомной науки и техники, 2019)
Multiperiodic nitride coatings (TiAlCrY)N/ZrN with different layer thicknesses are formed by vacuum-arc evaporation in a nitrogen atmosphere (0.2…0.6 Pa) of two targets, TiAlCrY and Zr. The targets were located along one ...