Investigation of Al-ZERODUR interface by Raman and secondary ion mass spectroscopy

Домашня сторінка
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Фізико-технічні та математичні науки
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Відділення фізики і астрономії
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Semiconductor Physics Quantum Electronics & Optoelectronics
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Semiconductor Physics Quantum Electronics & Optoelectronics, 2005, том 8
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Semicond. Physics Quantum Electronics & Optoelectronics, 2005, № 2
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dc.contributor.author	Berezhinsky, L.I.
dc.contributor.author	Yukhymchuk, V.A.
dc.contributor.author	Maslov, V.P.
dc.contributor.author	Tetyorkin, V.V.
dc.date.accessioned	2017-06-15T03:49:52Z
dc.date.available	2017-06-15T03:49:52Z
dc.date.issued	2005
dc.identifier.citation	Investigation of Al-ZERODUR interface by Raman and secondary ion mass spectroscopy / L.I. Berezhinsky, V.P. Maslov V.V. Tetyorkin and V.A.Yukhymchuk // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2005. — Т. 8, № 2. — С. 37-40. — Бібліогр.: 5 назв. — англ.	uk_UA
dc.identifier.issn	1560-8034
dc.identifier.other	PACS: 78.30.L
dc.identifier.uri	http://dspace.nbuv.gov.ua/handle/123456789/121644
dc.description.abstract	The interface of ZERODUR ceramics and thin aluminium film was investigated by Raman and secondary ion mass-spectroscopy techniques. Possible chemical reactions at the interface is briefly analyzed and compared with experimental data. Contributions of amorphous and crystalline phases of ZERODUR to Raman spectra are discussed. Keywords: ZERODUR ceramics, Raman spectra, secondary ion mass-spectroscopy. Manuscript received 19.04.05; accepted for publication 18.05.05.	uk_UA
dc.language.iso	en	uk_UA
dc.publisher	Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України	uk_UA
dc.relation.ispartof	Semiconductor Physics Quantum Electronics & Optoelectronics
dc.title	Investigation of Al-ZERODUR interface by Raman and secondary ion mass spectroscopy	uk_UA
dc.type	Article	uk_UA
dc.status	published earlier	uk_UA