Belyaeva, A.I.; Galuza, A.A.; Kudlenko, A.D.
(Semiconductor Physics Quantum Electronics & Optoelectronics, 2003)
A multiple angle ellipsometric method is used to investigate thin film layers on common substrates (gadolinium gallium garnet-GGG, sapphire-Al₂O₃, and glass ceramic sitall) for functional material films. The method evaluates ...