Lendel, V.V.; Lomakina, O.V.; Mel’nychenko, L.Yu.; Shaykevich, I.A.
(Semiconductor Physics Quantum Electronics & Optoelectronics, 2010)
Within the Beattie spectroellipsometric method, we measured the ellipsometric
parameters of thin Ті films deposited onto glass substrates by magnetron sputtering in
argon atmosphere. Measurements were carried out at five ...