Boltovets, M.S.; Ivanov, V.M.; Konakova, R.V.; Kudryk, Ya.Ya.; Milenin, V.V.; Shynkarenko, V.V.; Sheremet, V.M.; Sveshnikov, Yu.N.; Yavich, B.S.
(Semiconductor Physics Quantum Electronics & Optoelectronics, 2010)
We propose multilayer ohmic contacts to n- and p-GaN layers, with titanium
boride as diffusion barrier. It is shown that the optimal method of contact resistivity
measurement is the transmission line method (TLM) with ...