Chunadra, A.G.; Sereda, K.N.; Tarasov, I.K.; Bizyukov, A.A.
(Вопросы атомной науки и техники, 2015)
The results of technological tests of longitudinal planar magnetron sputtering system (MSS) with a magnetically isolated anode working in pulse-modes with additional pulse heavy-current high-voltage supply source are ...