Газочувствительные и светочувствительные варикапы для датчиков

Abstract

Получены варикапы на основе оксидов редкоземельных и многовалентных металлов, чувствительные к газам и свету.

The gas-sensitive and radiation-sensitive varicaps on the base of oxides of multicurrency and rareearth metals have been described. Varicaps have been obtained by oxidation of metals films on silicon surface with formation of p i n-structure in oxide. The varicaps characteristics in relation from action of ammonia aqueous solution vapours, smoke, wet air and light have been illustrated. Insertion of varicap in schematic diagram of negatron analog allows to obtain gas-sensitive sensor with frequency output.