Наукова електронна бібліотека
періодичних видань НАН України
періодичних видань НАН України
Control of planar magnetron sputtering system operating modes by additional anode magnetic field
Репозиторій DSpace/Manakin
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| dc.contributor.author | Bizyukov, A.A. | |
| dc.contributor.author | Girka, O.I. | |
| dc.contributor.author | Sereda, K.N. | |
| dc.contributor.author | Sleptsov, V.V. | |
| dc.contributor.author | Chunadra, A.G. | |
| dc.date.accessioned | 2011-02-26T22:24:01Z | |
| dc.date.available | 2011-02-26T22:24:01Z | |
| dc.date.issued | 2010 | |
| dc.identifier.citation | Control of planar magnetron sputtering system operating modes by additional anode magnetic field / A.A. Bizyukov, O.I. Girka, K.N. Sereda, V.V. Sleptsov, A.G. Chunadra // Вопросы атомной науки и техники. — 2010. — № 6. — С. 144-146. — Бібліогр.: 3 назв. — англ. | uk_UA |
| dc.identifier.issn | 1562-6016 | |
| dc.identifier.uri | http://dspace.nbuv.gov.ua/handle/123456789/17485 | |
| dc.description.abstract | The control of planar magnetron sputtering system operating modes by additional anode magnetic field was investigated. It was shown that additional anode magnetic field substantially affects to planar magnetron-sputtering system (MSS) balancing and allows adjusting the electron fluxes intensity to the operating surface. It was experimentally shown that the magnetic field intensity increasing stabilizes the low-current discharge. The magnetic field intensity increasing prevents the discharge extinction by the ignition of semi-self-maintained magnetron-type discharge in transverse anode magnetic field. | uk_UA |
| dc.description.sponsorship | This work was supported in part by The Foundation of Development & Modernization of Scientific and Educational Equipment of V.N. Karazin Kharkiv National University, project #29-10. | uk_UA |
| dc.language.iso | en | uk_UA |
| dc.publisher | Національний науковий центр «Харківський фізико-технічний інститут» НАН України | uk_UA |
| dc.subject | Низкотемпературная плазма и плазменные технологии | uk_UA |
| dc.title | Control of planar magnetron sputtering system operating modes by additional anode magnetic field | uk_UA |
| dc.title.alternative | Управление режимами работы планарной магнетронной распылительной системы дополнительным прианодным магнитным полем | uk_UA |
| dc.type | Article | uk_UA |
| dc.status | published earlier | uk_UA |
