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dc.contributor.author |
Kolomzarov, Yu. |
|
dc.contributor.author |
Oleksenko, P. |
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dc.contributor.author |
Sorokin, V. |
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dc.contributor.author |
Tytarenko, P. |
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dc.contributor.author |
Zelinskyy, R. |
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dc.date.accessioned |
2017-05-28T17:10:54Z |
|
dc.date.available |
2017-05-28T17:10:54Z |
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dc.date.issued |
2003 |
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dc.identifier.citation |
Vacuum method for creation of liquid crystal orienting microrelief / Yu. Kolomzarov, P. Oleksenko, V. Sorokin, P. Tytarenko, R. Zelinskyy // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2003. — Т. 6, № 4. — С. 528-532. — Бібліогр.: 16 назв. — англ. |
uk_UA |
dc.identifier.issn |
1560-8034 |
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dc.identifier.other |
PACS: 42.79.Kr |
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dc.identifier.uri |
http://dspace.nbuv.gov.ua/handle/123456789/118102 |
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dc.description.abstract |
A mechanism for creation of microrelief surface anisotropy of amorphous films oxides materials which are obtained by oblique reactive cathode sputtering method is described. The influence of technological parameters of sputtering on the LC orienting parameters is investigated. The dependencies of the target material, angle of material emission and reemission processes under the substrate negative ion treatment is shown. The application of oblique reactive cathode sputtering method for creation of LCD with differ-ent size is demonstrated. |
uk_UA |
dc.language.iso |
en |
uk_UA |
dc.publisher |
Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України |
uk_UA |
dc.relation.ispartof |
Semiconductor Physics Quantum Electronics & Optoelectronics |
|
dc.title |
Vacuum method for creation of liquid crystal orienting microrelief |
uk_UA |
dc.type |
Article |
uk_UA |
dc.status |
published earlier |
uk_UA |
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