Melnik, V.; Popov, V.; Kruger, D.; Oberemok, O.
(Semiconductor Physics Quantum Electronics & Optoelectronics, 1999)
Compositional characterization of sputtered and implanted titanium nitride (TiN) layers for microelectronics application is performed based on Auger Electron Spectroscopy (AES) and X-ray induced Photoelectron Spectroscopy ...