Перегляд за автором "Yefymenko, N."

Сортувати за: Порядок: Результатів:

  • Dudin, S.; Tkachenko, O.; Shchybria, A.; Yakovin, S.; Zykov, A.; Yefymenko, N. (Вопросы атомной науки и техники, 2018)
    The design and characteristics of a new combined magnetron-ion-beam sputtering system are presented. The system allows coating deposition both by means of magnetron discharge, and by sputtering of complex composite targets ...
  • Yakovin, S.; Zykov, A.; Dudin, S.; Yefymenko, N. (Вопросы атомной науки и техники, 2016)
    The investigation results of optimal conditions for synthesis of thin-film tantalum oxide dielectric coatings using the cluster multipurpose setup are presented. The set-up consist of DC magnetron, ICP source, and ...