Onoprienko, A.A.; Ivashchenko, V.I.; Kozak, A.O.; Sinelnichenko, A.K.; Tomila, T.V.
(Сверхтвердые материалы, 2019)
The effect of the gas mixture composition on the structure, chemical bond character and hardness of Si–B–C–N films was systematically studied. A series of Si–B–C–N films was deposited by reactive dc magnetron sputtering ...