Перегляд за автором "Onoprienko, A.A."

Результати 1-3 з 3

Characterization of Ti–B–C–N films deposited by dc magnetron sputtering of bicomponent Ti/B₄C target

Onoprienko, A.A.; Ivashchenko, V.I.; Timofeeva, I.I.; Sinelnitchenko, А.К.; Butenko, О.А. (Сверхтвердые материалы, 2015)

Quaternary Ti–B–C–N films have been deposited onto Si (100) substrates by dc magnetron sputtering of bi-component Ti/B₄C target in an Ar/N₂ gas mixture with different amounts of nitrogen in the mixture (from 0 to 50%). The ...
Deposition and characterization of thin Si–B–C–N films by dc reactive magnetron sputtering of composed Si/B₄C target

Onoprienko, A.A.; Ivashchenko, V.I.; Kozak, A.O.; Sinelnichenko, A.K.; Tomila, T.V. (Сверхтвердые материалы, 2019)

The effect of the gas mixture composition on the structure, chemical bond character and hardness of Si–B–C–N films was systematically studied. A series of Si–B–C–N films was deposited by reactive dc magnetron sputtering ...
Stydy on resistivity and micostructure of magnetron sputtered α-C:Si films

Onoprienko, A.A.; Yanchuk, I.B. (Functional Materials, 2006)

Electric resistivity and microstructure of silicon-doped (5 to 38 at. % Si) amorphous carbon (α-C) films deposited by de magnetron sputtering in argon plasma of composed (graphite + single crystalline silicon) target has ...

Результати 1-3 з 3

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