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dc.contributor.author Gutiérrez-Tapia, C.
dc.date.accessioned 2015-04-14T18:31:52Z
dc.date.available 2015-04-14T18:31:52Z
dc.date.issued 2002
dc.identifier.citation Ion kinetics in an ECR plasma source / C. Gutiérrez-Tapia // Вопросы атомной науки и техники. — 2002. — № 4. — С. 170-172. — Бібліогр.: 5 назв. — англ. uk_UA
dc.identifier.issn 1562-6016
dc.identifier.other PACS: 52.50.-b
dc.identifier.uri http://dspace.nbuv.gov.ua/handle/123456789/80327
dc.description.abstract In plasma reactors it is extremely important the study for achieving greater control of critical parameters such as the flux velocities and the energy distribution of ions. These quantities are functions of the reactor physical dimensions, magnetic field profile as well as the kinetic chemical reactions occurring in the discharge. In this work, a model previously reported in [1] is improved. In that model using the drift kinetic equation approach the axial and radial ion fluxes at processing zone of an ECR plasma source are calculated. Now, the ionization rates are calculated from the energy distribution function obtained by a regularization method and using the experimental data of the electric probe measurements. Also, a more exact calculation of the external magnetic field is included. uk_UA
dc.description.sponsorship This work was patially supported by project CONACyT 33873-E uk_UA
dc.language.iso en uk_UA
dc.publisher Національний науковий центр «Харківський фізико-технічний інститут» НАН України uk_UA
dc.relation.ispartof Вопросы атомной науки и техники
dc.subject Low temperature plasma and plasma technologies uk_UA
dc.title Ion kinetics in an ECR plasma source uk_UA
dc.type Article uk_UA
dc.status published earlier uk_UA

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