Dudin, S.V.; Farenik, V.I.; Dahov, A.N.; Walkowicz, J.
(Физическая инженерия поверхности, 2005)
The technique of arc suppression on the target surface of magnetron sputtering system during reactive
deposition of Al₂O₃ coatings has been developed. Damping of arcs is achieved by transient
polarity change of the ...