Bazhenov, V.Yu.; Tsiolko, V.V.; Piun, V.M.; Chaplinskiy, R.Yu.; Kuzmichev, A.I.
(Вопросы атомной науки и техники, 2014)
Glow characteristics of capacitive radio frequency discharge with isolated electrodes in atmospheric pressure argon in low-current α and high-current γ modes are determined experimentally and calculated by the hybrid ...