Glazunov, G.P.; Andreev, A.A.; Sobol, O.V.; Bondarenko, M.N.; Konotopskiy, A.L.; Stolbovoy, V.A.
(Вопросы атомной науки и техники, 2014)
The erosion process was investigated of TiN coatings which were made with the vacuum-arc sputtering of Ti at the different nitrogen pressures (10⁻⁴…5•10⁻³ Torr). The erosion rates were measured by the weighting on analytical ...