Gapon, A.V.; Dahov, A.N.; Dudin, S.V.; Zykov, A.V.; Azarenkov, N.A.
(Вопросы атомной науки и техники, 2006)
The software for ICP device simulation is worked out. Discharge chamber geometry, RF power, pressure and working
gas type are the input data. The results of calculation are inductor voltage, ion current density distribution ...