Dobrovolskiy, A.M.; Goncharov, A.A.; Kostin, E.G.; Frolova, E.K.
(Вопросы атомной науки и техники, 2013)
The paper describes the peculiarities of deposition nano-sized titanium dioxide coatings in the cylindrical inverted gas magnetron. It is shown the influence of the main parameters magnetron sputtering, like as working gas ...