Aksyonov, D.S.; Aksenov, I.I.; Luchaninov, A.A.; Reshetnyak, E.N.; Strel’nitskij, V.E.
(Вопросы атомной науки и техники, 2011)
Composite films were formed by vacuum-arc method using two plasma sources equipped with aluminum and titanium cathodes. The sources were coupled with a dual channel T-shaped magnetic filter. Ability of Ti-Al-N films ...