Kravchenko, O. Yu.; Yastrub, Yu. A.; Levada, G.I.; Lisitchenko, T.Y.
(Вопросы атомной науки и техники, 2009)
We study ion energy distributions functions (IEDFs) within an rf sheath with dust particles in SiH₄ radio-frequency discharges and compare results with ones in Ar rf discharges. The simulations are carried by PIC/MCC method ...