Demchishin, A.V.; Evsyukov, A.N.; Goncharov, A.A.; Kostin, E.G.
(Вопросы атомной науки и техники, 2008)
We describe the state-of-the-art method of monitoring optical parameters the cylindrical gas discharge plasma of magnetron type. An analysis and characterization of the spectrum during a process of titanium nitride deposition ...