Fedorchenko, V.D.; Chebotarev, V.V.; Garkusha, I.E.; Medvedev, A.V.; Tereshin, V.I.; Shevchuk, B.A.
(Вопросы атомной науки и техники, 2008)
The plasma parameters and its homogeneity were measured in ECR planar plasma source with multipolar magnetic field, which is created by three parallel magnetic bars of 12 cm in length consisted of set of the permanent ...