Polozhii, H.E.; Ponomarev, A.G.; Kolinko, S.V.; Rebrov, V.A.
(Вопросы атомной науки и техники, 2022)
Vector method for scanning with focused beam of megaelectronvolt-energy in proton-beam writing is described. Vector proton-beam writing method was proven experimentally to have numerous advantages over raster method. Focused ...