Aksyonov, D.S.; Vasyliev, V.V.; Luchaninov, A.A.; Strelnitskij, V.E.
(Вопросы атомной науки и техники, 2021)
The vacuum-arc plasma source with a rectilinear filter has been optimized for deposition of coatings on large size products. The calculations of the magnetic configuration options of the system were performed by using the ...