Romashchenko, E.V.; Bizyukov, A.A.; Girka, I.О.
(Вопросы атомной науки и техники, 2019)
An analytical model of the interaction of macroparticle (MP) with vacuum arc plasma in plasma immersion ion implantation (PIII) is presented. The proposed model is based on combination of the theory of charge dynamics of ...