Belous, V.A.; Lunyov, V.M.; Kuprin, A.S.; Bortnitskaya, M.A.
(Вопросы атомной науки и техники, 2018)
The structure, microhardness and protective properties of titanium oxide and titanium oxynitride coatings formed
in vacuum arc plasma fluxes depending on the negative potential on the substrate and the oxygen pressure, ...