Kalinichenko, A.I.; Perepelkin, S.S.; Reshetnyak, E.N.; Strel’nitskij, V.E.
(Вопросы атомной науки и техники, 2018)
In the model of the nonlocal thermoelastic peak of low-energy ion, the formation of intrinsic stress in the coating deposited from inclined ion beam at the pulsed bias potential with different values of pulse frequency f ...