Konotopsky, L.E.; Kopilets, I.A.; Kosmachev, S.M.; Kondratenko, V.V.
(Вопросы атомной науки и техники, 2017)
A Zr/Mg periodic multilayer was deposited onto silicon substrate by DC magnetron sputtering. Study of the Zr/Mg multilayer structure in an initial state and after thermal annealing in a temperature range of 100...600 °C ...