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періодичних видань НАН України
періодичних видань НАН України
Mechanical scanning probe nanolithography: modeling and application
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- Відділення фізики і астрономії
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- Semiconductor Physics Quantum Electronics & Optoelectronics
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- Semiconductor Physics Quantum Electronics & Optoelectronics, 2012, том 15
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- Semicond. Physics Quantum Electronics & Optoelectronics, 2012, № 4
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| dc.contributor.author | Lytvyn, P.M. | |
| dc.contributor.author | Lytvyn, O.S. | |
| dc.contributor.author | Dyachyns’ka, O.M. | |
| dc.contributor.author | Grytsenko, K.P. | |
| dc.contributor.author | Schrader, S. | |
| dc.contributor.author | Prokopenko, I.V. | |
| dc.date.accessioned | 2017-05-31T05:16:38Z | |
| dc.date.available | 2017-05-31T05:16:38Z | |
| dc.date.issued | 2012 | |
| dc.identifier.citation | Mechanical scanning probe nanolithography: modeling and application / P.M. Lytvyn, O.S. Lytvyn, O.M. Dyachyns’ka, K.P. Grytsenko, S. Schrader, I.V. Prokopenko // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2012. — Т. 15, № 4. — С. 321-327. — Бібліогр.: 23 назв. — англ. | uk_UA |
| dc.identifier.issn | 1560-8034 | |
| dc.identifier.other | PACS 81.16.Nd | |
| dc.identifier.uri | http://dspace.nbuv.gov.ua/handle/123456789/118721 | |
| dc.description.abstract | The paper presents a study on modeling the mechanical interaction between the tip of a scanning atomic force microscope (AFM) and surfaces of various types, which makes it possible to optimize parameters and modes for mechanical AFM nanolithography. The practical assessment of mechanical nanoprobe lithography based on the method of a direct surface patterning was carried out during fabrication of functional elements for molecular electronics. Polymethine dye nanowires of a specified configuration and the cross-section 3×20 nm have been successfully formed in a multilayer polytetrafluoroethylene/gold/silicon nanostructure. | uk_UA |
| dc.language.iso | en | uk_UA |
| dc.publisher | Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України | uk_UA |
| dc.relation.ispartof | Semiconductor Physics Quantum Electronics & Optoelectronics | |
| dc.title | Mechanical scanning probe nanolithography: modeling and application | uk_UA |
| dc.type | Article | uk_UA |
| dc.status | published earlier | uk_UA |
