Bizyukov, A.A.; Girka, I.O.; Romashchenko, E.V.; Chibisov, O.D.
(Вопросы атомной науки и техники, 2016)
The macroparticle (MP) contamination is the most important technological problem of vacuum arc deposition of
coatings. The results of theoretical study of MP charging and dynamics in the near-substrate sheath are ...