Ivanov, V.N.; Konakova, R.V.; Milenin, V.V.; Stovpovoi, M.A.
(Semiconductor Physics Quantum Electronics & Optoelectronics, 2003)
We studied barrier and ohmic contacts that are used when developing GaAs-based microwave devices. It is shown that Au-Mo-TiBx-n-GaAs barrier contacts have higher thermal stability than Au-Ti-n-GaAs ones. This is due to ...