Kovtun, Yu.V; Skibenko, E.I.; Skibenko, A.I.; Kuprin, A.S.; Ozerov, A.N.; Syusko, E.V.; Yuferov, V.B.
(Вопросы атомной науки и техники, 2016)
The paper is concerned with the distribution of cathode material sputtered under the action of the pulsed reflex discharge plasma and deposited on the anode surface (vacuum chamber) by means of a set of discrete receiving ...