Khomenkova, L.; Korsunska, N.; Sheinkman, M.; Stara, T.
(Semiconductor Physics Quantum Electronics & Optoelectronics, 2007)
The process of thermal decomposition of SiOx layers prepared by magnetron
sputtering is studied with the use of photoluminescence and Auger and SIMS
spectroscopies. From these measurements, we obtained the distributions ...