Masunov, E.S.; Polozov, S.M.; Kulevoy, T.V.; Kuibeda, R.P.; Pershin, V.I.; Petrenko, S.V.; Seleznev, D.N.; Shamailov, I.M.; Sitnikov, A.L.
(Вопросы атомной науки и техники, 2008)
The design of ribbon ion source and transport system is discussed in this paper. This system is created at ITEP for ion beam implantation in semiconductor technology. The Bernas type ion sources are used for ribbon ion ...