Taran, V.S.; Muratov, R.M.; Nezovibat'ko, Y.N.; Leonovych, A.V.; Sergiiets, M.A.
(Вопросы атомной науки и техники, 2017)
Investigation results for technological process of low temperature plasma deposition of functional coverings for dielectric substrate at low temperatures (50…250 oC) are shown. Combined high frequency and arc plasma sources ...