Kalinichenko, A.I.; Perepelkin, S.S.; Strel’nitskij, V.E.
(Вопросы атомной науки и техники, 2017)
In model of nonlocal thermoelastic peak of low energy ion the process of intrinsic stress formation in the multi-component coatings CrN, Cr₀.₅Al₀.₅ N, TiN, Ti₀.₅Al₀.₅N, deposited by vacuum arc method from ion beams Cr⁺, ...