Panchenko, O.A.; Goncharov, A.A.; Demchishin, A.V.; Kostin, E.G.; Pavlov, S.N.; Stetsenko, B.V.
(Вопросы атомной науки и техники, 2005)
The results of calculations of atom flows, sputtered from a cathode of special cylindrical magnetron sputtering system, presented. The atoms flow in cylinder magnetron will be larger with respect to planar magnetron due ...