Kalinichenko, A.I.; Omarov, A.О.; Strel’nitskij, V.E.
(Вопросы атомной науки и техники, 2021)
Diamond-like coatings (DLC) synthesized by plasma-chemical deposition from a vapor mixture of C₆H₆ and Ar have been investigated. The growth rate of the coating was measured, which showed a nonlinear dependence on the ...